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Longitudinal spatial coherence applied for surface profilometry.

J Rosen1, M Takeda

  • 1Department of Electrical and Computer Engineering, Ben-Gurion University of the Negev, P.O. Box 653, Beer-Sheva 84105, Israel. rosen@ee.bgu.ac.il

Applied Optics
|March 20, 2008
PubMed
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A novel optical coherence profilometry method uses spatial coherence, not temporal, for surface profiling. This technique measures surface profiles by adjusting spatial coherence along the longitudinal axis.

Area of Science:

  • Optics and Photonics
  • Metrology
  • Surface Science

Background:

  • Traditional optical coherence profilometry relies on temporal coherence.
  • Broadband light sources are commonly used in existing methods.
  • Limitations exist in current profilometry techniques regarding source requirements.

Purpose of the Study:

  • To demonstrate a new method for optical coherence profilometry.
  • To utilize spatial coherence phenomena for surface profile measurement.
  • To present an alternative interferometric system for profilometry.

Main Methods:

  • Illumination with a quasi-monochromatic spatial incoherent source.
  • Measurement based on the spatial coherence phenomenon.
  • Shifting the spatial degree of coherence along the longitudinal axis.

Related Experiment Videos

  • Maintaining a constant optical path difference.

    • Main Results:

    • Successful demonstration of a new optical coherence profilometry method.
    • Surface profiles measured by manipulating spatial coherence.
    • Experimental validation of the proposed principle.

    Conclusions:

    • A novel approach to optical coherence profilometry has been established.
    • The method offers an alternative to temporal coherence-based techniques.
    • Spatial coherence provides a viable basis for surface profiling applications.