Updated: Jul 6, 2026

Compact Lens-less Digital Holographic Microscope for MEMS Inspection and Characterization
Published on: July 5, 2016
1Observatoire de Marseille, 2 Place Le Verrier, F-13248 Marseille, Cedex 4, France. Lemaitre@observatoire.cnrs-mrs.fr
This study simplifies holographic grating recording using a multimode deformable mirror (MDM) for aberration correction. The MDM compensator corrects higher-order aberrations, significantly improving image quality and spectral resolution for astronomical spectrographs.
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