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Updated: Jul 6, 2026

Atomically Traceable Nanostructure Fabrication
Published on: July 17, 2015
Atomic-hydrogen mapping in hot-filament chemical-vapor deposition
Abstract:
Two-dimensional maps of the atomic-hydrogen concentration distribution were acquired with two-photon laser-induced fluorescence. The environment was a hot-filament chemical-vapor-deposition reactor used for polycrystalline diamond-film deposition. The maps were measured in situ under diamond-deposition conditions with variation of the growth parameters. The parameters investigated were filament temperature, input methane concentration, and total pressure.
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