Related Experiment Video
Updated: Jul 6, 2026

15:25
Design and Characterization Methodology for Efficient Wide Range Tunable MEMS Filters
Published on: February 4, 2018
Thermally stable narrow-bandpass filter prepared by reactive ion-assisted sputtering
Applied Optics
|March 22, 2008
Summary
This study investigated the thermal stability of narrow-bandpass (NB) filters. The filters demonstrated excellent moisture resistance and minimal temperature-dependent wavelength shifts, meeting industry standards for optical-fiber communication.
Area of Science:
- Optical engineering
- Materials science
- Thin film technology
Background:
- Narrow-bandpass (NB) filters are crucial components in optical-fiber communication systems.
- Ensuring the thermal stability and moisture resistance of these filters is essential for reliable performance.
- High-index dielectric materials like Ta2O5 and SiO2 are commonly used in filter fabrication.
Purpose of the Study:
- To investigate the thermal stabilities of three-cavity NB filters.
- To evaluate the moisture resistance and temperature-dependent wavelength shifts of these filters.
- To determine compliance with industry standards for optical communication components.
Main Methods:
- Fabrication of NB filters using reactive ion-assisted bipolar direct-current (dc) magnetron sputtering.
- Utilized tantalum and silicon targets with argon sputtering gas and oxygen reactant.
- Characterized film properties including refractive indices and performed water-immersion tests.
- Measured temperature-dependent wavelength shifts from room temperature to 75 degrees C.
Main Results:
- Achieved refractive indices of 2.1 for Ta2O5 and 1.45 for SiO2 at 1550 nm.
- Demonstrated excellent moisture-resistant properties, indicating high film packing density.
- Observed minimal temperature-dependent wavelength shifts (<3 x 10(-3) nm/°C).
- The total wavelength shift remained below 0.15 nm over a 75°C temperature range.
Conclusions:
- The fabricated NB filters exhibit excellent thermal stability and moisture resistance.
- The filters meet the stringent requirements of Bellcore GR-1209-CORE for optical-fiber communication.
- The sputtering method provides high-quality films suitable for demanding optical applications.
Related Concept Videos
Passive Filters
Passive filters are utilized to shape the frequency spectrum of signals across a diverse array of applications. These filters, using only passive elements like resistors (R), inductors (L), and capacitors (C), are capable of selectively allowing or blocking certain frequency ranges without the need for external power sources.
Low-Pass Filters
Low-pass filters are designed to transmit signals with frequencies lower than the cutoff frequency, ωc, and attenuate those above it. The cutoff frequency...
Low-Pass Filters
Low-pass filters are designed to transmit signals with frequencies lower than the cutoff frequency, ωc, and attenuate those above it. The cutoff frequency...
Active Filters
Active filters are electronic circuits that use operational amplifiers (op-amps), resistors, and capacitors to filter out unwanted frequency components from a signal. A first-order low-pass active filter is designed to pass signals with a frequency lower than a certain cutoff frequency and attenuate frequencies higher than that cutoff frequency. The transfer function for a first-order low-pass active filter is:

