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Updated: Jul 6, 2026

Shaping the Amplitude and Phase of Laser Beams by Using a Phase-only Spatial Light Modulator
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Phase-locked phase-shifting laser diode interferometer with photothermal modulation.

T Suzuki, X Zhao, O Sasaki

    Applied Optics
    |March 22, 2008
    PubMed
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    This study introduces a novel phase-shifting interferometer combining phase-locked and photothermal modulation for enhanced accuracy. The new design minimizes intensity modulation, achieving high-precision surface profile measurements of a diamond-turned aluminum disk.

    Area of Science:

    • Optical metrology
    • Surface characterization
    • Interferometry

    Background:

    • Intensity modulation in interferometry can compromise measurement accuracy.
    • Traditional modulation techniques often introduce unwanted intensity variations.
    • Precise surface profiling is crucial in advanced manufacturing and materials science.

    Purpose of the Study:

    • To develop a phase-shifting interferometer immune to intensity modulation.
    • To improve the accuracy and repeatability of surface profile measurements.
    • To demonstrate the effectiveness of combined phase-locked and photothermal modulation.

    Main Methods:

    • Implementation of a phase-shifting interferometer utilizing both phase-locked and photothermal modulation techniques.
    • Measurement of the surface profile of a diamond-turned aluminum disk.

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  • Analysis of measurement repeatability and accuracy.

    • Main Results:

    • The proposed interferometer effectively eliminates the impact of intensity modulation on measurement accuracy.
    • High-resolution surface profile measurement of a diamond-turned aluminum disk was achieved.
    • An impressive root-mean-square (rms) repeatability of lambda/460 was obtained.

    Conclusions:

    • The combination of phase-locked and photothermal modulation offers a robust solution for accurate interferometric measurements.
    • This technique significantly enhances measurement precision compared to conventional methods.
    • The developed interferometer is suitable for demanding surface characterization applications.