Experimental study of a shearing interferometer concept for at-wavelength characterization of extreme-ultraviolet...

We describe the experimental evaluation of a shearing interferometer concept for at-wavelength testing of extreme-ultraviolet optics. The concept is based on the Ronchi test, which has been modified by a new design for entrance and exit gratings to suppress disturbing higher-order interference patterns. The interferometer concept has been tested on an experimental setup, of which all relevant parameters have been scaled from extreme-ultraviolet to visible-light wavelengths. A Twyman-Green interferometer has been integrated into the setup for comparison with the improved Ronchi test. A systematic difference of 7-12 mlambda rms has been found between wave fronts measured with the improved Ronchi test and with the Twyman-Green interferometer. Possible error sources have been analyzed. The accuracy of the interferometer is estimated to be 10 mlambda rms.