Phase-shifting moireí method with an atomic force microscope.

Area of Science:

• Materials Science
• Nanotechnology
• Metrology

Background:

• Atomic Force Microscopy (AFM) is a powerful tool for nanoscale imaging and measurement.
• Moiré techniques are widely used for precise measurements, particularly in optics and materials science.
• Accurate thermal deformation measurement is crucial for the reliability of electronic packages.

Purpose of the Study:

• To introduce a novel phase-shifting AFM scanning moiré method.
• To detail the measurement principles and experimental setup of this new technique.
• To demonstrate the method's application in analyzing thermal deformation of electronic packages.

Main Methods:

• Phase-shifting technique implemented with an atomic force microscope (AFM).
• Four-step phase shifting (0 to 2π) achieved using a piezoscanner within the AFM.
• Application to analyze the phase distribution in AFM moiré patterns of a holographic grating.

Main Results:

• Successfully determined the phase distribution in AFM moiré patterns.
• Quantified thermal deformation in a Quad FlatPack electronic package using the developed method.
• Demonstrated the efficacy of the phase-shifting AFM scanning moiré technique for microscale thermal analysis.

Conclusions:

• The proposed phase-shifting AFM scanning moiré method offers a precise approach for microscale thermal deformation analysis.
• This technique provides valuable insights into the thermomechanical behavior of electronic components.
• The method holds potential for quality control and reliability assessment in microelectronics manufacturing.