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Vibration-compensated interferometer for surface metrology.

C Zhao, J H Burge

    Applied Optics
    |March 28, 2008
    PubMed
    Summary
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    This study presents an advanced interferometer that actively compensates for severe vibrations, enabling high-resolution surface metrology. The system uses a true phase servo for accurate measurements in challenging environments.

    Area of Science:

    • Optical Engineering
    • Metrology
    • Vibration Control

    Background:

    • Surface metrology is crucial for quality control in various industries.
    • Severe environmental vibrations pose a significant challenge to high-resolution surface measurements.
    • Existing methods like fringe locking have limitations in dynamic phase compensation.

    Purpose of the Study:

    • To develop and demonstrate an advanced interferometer capable of high-resolution surface metrology in vibration-prone environments.
    • To implement an active control system for real-time vibration compensation.
    • To enable accurate phase-shifting interferometry despite dynamic environmental disturbances.

    Main Methods:

    • Construction of an advanced interferometer with active vibration compensation.

    Related Experiment Videos

  • Utilizing a digital signal processor (DSP) and electro-optic modulator for high-speed phase control (4000 Hz).
  • Implementation of a real-time servo system for a vibration-corrected phase ramp, distinct from fringe locking.

    • Main Results:

    • Successful compensation of severe vibration effects on surface measurements.
    • Achieved high-resolution phase measurements at video rates.
    • Demonstrated a true phase servo enabling stabilized, ramped phase shifts for phase-shifting interferometry.

    Conclusions:

    • The developed interferometer effectively overcomes vibration challenges in surface metrology.
    • The active phase servo system allows for accurate, high-resolution measurements in dynamic environments.
    • This technology advances the capabilities of phase-shifting interferometry for demanding applications.