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Related Experiment Video

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Characterization of SiN Integrated Optical Phased Arrays on a Wafer-Scale Test Station
05:57

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Published on: April 1, 2020

Robust, common path, phase shifting interferometer and optical profilometer.

Remy Tumbar1, Daniel L Marks, David J Brady

  • 1Department of Molecular Biology and Genetics, Cornell University, Ithaca, New York 14853, USA. rt77@cornell.edu

Applied Optics
|April 3, 2008
PubMed
Summary
This summary is machine-generated.

This study presents an improved interferometer for precise surface profiling. The enhanced system offers higher resolution and stability, making it ideal for microscopic imaging and wavefront sensing applications.

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Area of Science:

  • Optical Metrology
  • Interferometry
  • Surface Profilometry

Background:

  • Common-path, phase shifting, and shearing interferometers are valuable tools in metrology.
  • Previous implementations had limitations in sampling resolution and light sensitivity.

Purpose of the Study:

  • To describe an improved implementation of a common-path, phase shifting, and shearing interferometer.
  • To demonstrate enhanced performance metrics including sampling resolution and light sensitivity.
  • To showcase the system's applicability in microscopic imaging and wavefront sensing.

Main Methods:

  • Utilized a time-multiplexed phase shifting scheme for enhanced data acquisition.
  • Implemented arbitrary phase shifting algorithms for increased flexibility.
  • Performed microscopic imaging of a copper-plated silicon wafer surface.

Main Results:

  • Achieved higher sampling resolution and improved light sensitivity compared to previous designs.
  • Demonstrated vibration insensitivity with approximately lambda/100 repeatability.
  • Successfully imaged the surface profile of a copper-plated silicon wafer.

Conclusions:

  • The improved interferometer offers superior performance for precise surface metrology.
  • The system's vibration insensitivity and high repeatability make it suitable for demanding applications.
  • Potential applications include full-field coherent imaging and high dynamic range wavefront sensing.