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Robust, common path, phase shifting interferometer and optical profilometer.

Remy Tumbar1, Daniel L Marks, David J Brady

  • 1Department of Molecular Biology and Genetics, Cornell University, Ithaca, New York 14853, USA. rt77@cornell.edu

Applied Optics
|April 3, 2008
PubMed
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This study presents an improved interferometer for precise surface profiling. The enhanced system offers higher resolution and stability, making it ideal for microscopic imaging and wavefront sensing applications.

Area of Science:

  • Optical Metrology
  • Interferometry
  • Surface Profilometry

Background:

  • Common-path, phase shifting, and shearing interferometers are valuable tools in metrology.
  • Previous implementations had limitations in sampling resolution and light sensitivity.

Purpose of the Study:

  • To describe an improved implementation of a common-path, phase shifting, and shearing interferometer.
  • To demonstrate enhanced performance metrics including sampling resolution and light sensitivity.
  • To showcase the system's applicability in microscopic imaging and wavefront sensing.

Main Methods:

  • Utilized a time-multiplexed phase shifting scheme for enhanced data acquisition.
  • Implemented arbitrary phase shifting algorithms for increased flexibility.

Related Experiment Videos

  • Performed microscopic imaging of a copper-plated silicon wafer surface.
  • Main Results:

    • Achieved higher sampling resolution and improved light sensitivity compared to previous designs.
    • Demonstrated vibration insensitivity with approximately lambda/100 repeatability.
    • Successfully imaged the surface profile of a copper-plated silicon wafer.

    Conclusions:

    • The improved interferometer offers superior performance for precise surface metrology.
    • The system's vibration insensitivity and high repeatability make it suitable for demanding applications.
    • Potential applications include full-field coherent imaging and high dynamic range wavefront sensing.