Related Experiment Video
Updated: Jul 6, 2026

07:12
A Standard and Reliable Method to Fabricate Two-Dimensional Nanoelectronics
Published on: August 28, 2018
Fabrication of a versatile substrate for finding samples on the nanometer scale
D B Nowak1, M K Vattipalli, J J Abramson
1Department of Physics, Portland State University, PO Box 751, Portland, OR 97207, USA.
Journal of Microscopy
|April 5, 2008
Summary
Researchers developed a universal substrate for nanometer-scale studies. Focused ion beam milling creates reference grids, enabling precise relocation of regions of interest across multiple analytical systems.
Area of Science:
- Materials Science
- Nanotechnology
- Analytical Chemistry
Background:
- Relocating nanometer-scale objects across different analytical systems presents a significant research challenge.
- Existing transmission electron microscope (TEM) grids have limited resolution for precise nanoscale localization.
Purpose of the Study:
- To introduce a novel technique for creating universal substrates for nanoscale analysis.
- To enable accurate relocation of regions of interest (ROI) across diverse imaging modalities.
Main Methods:
- Utilizing focused ion beam (FIB) milling to create precise reference grids on various substrates.
- Demonstrating the technique on both commercial TEM grids and bulk glass samples.
- Employing multiple analytical techniques including optical microscopy, FIB, SEM, TEM, and AFM for validation.
Main Results:
- Achieved sub-micrometer resolution for reference grids, significantly improving upon standard TEM grid spacings.
- Successfully demonstrated the ability to relocate nanoscale features (e.g., 25 nm gold nanoparticles) using the milled grids.
- Validated the technique's applicability across a range of analytical instruments without special sample preparation.
Conclusions:
- The FIB-milled reference grid technique provides a universal solution for nanoscale sample navigation.
- This method enhances the precision and ease of relocating ROIs in advanced microscopy and analysis.
- The technique is versatile, applicable to various substrates and compatible with multiple imaging techniques.

