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Updated: Jul 6, 2026

Fabrication and Characterization of Thickness Mode Piezoelectric Devices for Atomization and Acoustofluidics
Published on: August 5, 2020
Piezoacoustic wave spectra using improved surface impedance matrix: application to high impedance-contrast layered
Victor Y Zhang1, Bertrand Dubus, Bernard Collet
1Institut d'Electronique, de Microélectronique, et de Nanotechnologie, UMR 8520, Laboratoire Central de l'Institut, Avenue Poincaré - BP 6009, 59652 Villeneuve d'Ascq Cedex, France. victor.zhang@iemn.univ-lillel.fr
Abstract:
Starting from the general modal solutions for a homogeneous layer of arbitrary material and crystalline symmetry, a matrix formalism is developed to establish the semianalytical expressions of the surface impedance matrices (SIM) for a single piezoelectric layer. By applying the electrical boundary conditions, the layer impedance matrix is reduced to a unified elastic form whether the material is piezoelectric or not. The characteristic equation for the dispersion curves is derived in both forms of a three-dimensional acoustic SIM and of an electrical scalar function. The same approach is extended to multilayered structures such as a piezoelectric layer sandwiched in between two metallic electrodes, a Bragg coupler, and a semi-infinite substrate as well. The effectiveness of the approach is numerically demonstrated by its ability to determine the full spectra of guided modes, even at extremely high frequencies, in layered plates comprising up to four layers and three materials. Negative slope in f-k curve for some modes, asymptotic behavior at short wavelength regime, as well as wave confinement phenomena made evident by the numerical results are analyzed and interpreted in terms of the surface acoustic waves and of the interfacial waves in connection with the bulk waves in massive materials.
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