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Optimal implementation of a microspectrometer based on a single flat diffraction grating.

Semen Grabarnik1, Arvin Emadi, Elena Sokolova

  • 1Faculty Electrical Engineering, Mathematics and Computer Science, Department of MicroElectronics/Electronic Instrumentation, Delft University of Technology, Delft, The Netherlands.

Applied Optics
|April 22, 2008
PubMed
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A new analytical model optimizes the design of a miniaturized optical microspectrometer. This validated tool enables the smallest dimensions for a planar spectrometer, achieving 6 nm spectral resolution.

Area of Science:

  • Optics and Photonics
  • Microelectromechanical Systems (MEMS)

Background:

  • Miniaturization of optical instruments is crucial for portable sensing applications.
  • Diffraction grating-based spectrometers offer compact spectral analysis solutions.
  • Existing designs face limitations in size and spectral resolution trade-offs.

Purpose of the Study:

  • To develop and validate an analytical model for designing highly miniaturized planar optical microspectrometers.
  • To explore the design limits for achieving minimal dimensions while maintaining spectral resolution.

Main Methods:

  • Development of an analytical design model for an imaging diffraction grating spectrometer.
  • Fabrication using microelectromechanical system (MEMS) technology on a single glass wafer.
  • Integration of reflective slit and imaging diffraction grating within parallel glass plates.

Related Experiment Videos

  • Utilization of IC-compatible deposition and lithography for aluminum component realization.

    • Main Results:

    • The validated model identifies design limits for minimal spectrometer dimensions.
    • A planar spectrometer with a volume of 50 mm³ was fabricated and tested.
    • Achieved a measured spectral resolution of 6 nm (FWHM) over a 100 nm wavelength range (600-700 nm).
    • Fabrication demonstrated high tolerance for component mismatch due to aluminum parts.

    Conclusions:

    • The analytical model effectively guides the design of ultra-compact optical microspectrometers.
    • MEMS fabrication enables highly integrated and miniaturized spectrometer devices.
    • The developed microspectrometer design meets performance requirements for spectral analysis in a small form factor.