Dual-reflector configuration in varied line-space grating displacement sensor

Zhengkun Liu1, Xiangdong Xu, Qin Zhou

  • 1National Synchrotron Radiation Laboratory, University of Science and Technology of China, Hefei, Anhui 230029, China.

Summary

A new dual-reflector configuration significantly improves grating displacement sensor accuracy. This method reduces measured displacement errors to below 0.03 mm, a tenfold improvement over single-mirror designs.

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