In situ optical characterization and reengineering of interference coatings
Steffen Wilbrandt1, Olaf Stenzel, Norbert Kaiser
1Fraunhofer Institute of Applied Optics and Precision Engineering, Albert-Einstein-Strasse 7, D-07745 Jena, Germany. steffen.wilbrandt@iof.fraunhofer.de
Abstract:
A new optical monitoring system has been developed that allows recording of transmission spectra in the wavelength range between 400 and 920 nm of a growing optical coating during deposition. Several kinds of thin film sample have been prepared by use of a hybrid monitoring strategy that is essentially based on a combination of quartz monitoring and in situ transmission spectra measurements. We demonstrate and discuss the applicability of our system for reengineering procedures of high-low stacks and measurements of small vacuum or thermal shifts of optical coatings.
