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Preparation of Macroporous Epitaxial Quartz Films on Silicon by Chemical Solution Deposition
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Preparation of Macroporous Epitaxial Quartz Films on Silicon by Chemical Solution Deposition

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Facile and controlled synthesis of ultra-thin low dielectric constant meso/microporous silica films

Richard A Farrell1, Nikolay Petkov, Karim Cherkaoui

  • 1Department of Chemistry and Tyndall National Institute, University College Cork, Cork, Ireland.

Chemphyschem : a European Journal of Chemical Physics and Physical Chemistry
|May 17, 2008
PubMed
Abstract

No abstract available in PubMed .

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