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Updated: Jul 5, 2026

Compact Lens-less Digital Holographic Microscope for MEMS Inspection and Characterization
10:28

Compact Lens-less Digital Holographic Microscope for MEMS Inspection and Characterization

Published on: July 5, 2016

Measurement of curvature and twist of a deformed object using digital holography

Wen Chen1, Chenggen Quan, Cho Jui Tay

  • 1Department of Mechanical Engineering, National University of Singapore, Singapore.

Applied Optics
|May 22, 2008
PubMed

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