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Published on: March 19, 2016
Low loss and high speed silicon optical modulator based on a lateral carrier depletion structure
Delphine Marris-Morini1, Laurent Vivien, Jean Marc Fédéli
1Institut d'Electronique Fondamentale, Université Paris-Sud-CNRS, Bât. 220, F-91405 ORSAY cedex - France. delphine.morini@u-psud.fr
Abstract:
A high speed and low loss silicon optical modulator based on carrier depletion has been made using an original structure consisting of a p-doped slit embedded in the intrinsic region of a lateral pin diode. This design allows a good overlap between the optical mode and carrier density variations. Insertion loss of 5 dB has been measured with a contrast ratio of 14 dB for a 3 dB bandwidth of 10 GHz.
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