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Fizeau-type multi-pass Shack-Hartmann-Test.

J Schwider1

  • 1Friedrich Alexander University of Erlangen-Nürnberg, Staudtstr. 7/B2, 91058 Erlangen, Germany. schwider@optik.uni-erlangen.de

Optics Express
|June 4, 2008
PubMed
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This study explores using Shack-Hartmann sensor stability for sensitive wavefront testing. A Fizeau-type resonator enhances phase sensitivity, enabling tests on opaque surfaces and improving measurement repeatability.

Area of Science:

  • Optical metrology
  • Wavefront sensing
  • Surface testing

Background:

  • Shack-Hartmann sensors offer stability against environmental disturbances, suitable for sensitive wavefront tests.
  • Fizeau interferometry is a technique for precise optical surface measurements.

Purpose of the Study:

  • To investigate the exploitation of Shack-Hartmann sensor stability in a Fizeau-type multiple beam test.
  • To enhance phase sensitivity for wavefront testing of surfaces, including opaque ones.

Main Methods:

  • Utilizing a Fizeau resonator formed by two highly reflecting mirror surfaces.
  • Employing a Shack-Hartmann sensor for wavefront measurements.
  • Investigating multiple beam passes through the Fizeau resonator to multiply sensitivity.

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Main Results:

  • The Fizeau resonator enhances phase sensitivity, allowing tests in reflected light, applicable to opaque surfaces.
  • Sensitivity multiplication with multiple passes compensates for limited repeatability of wavefront measurements.
  • The method was successfully tested for planeness Fizeau measurements.

Conclusions:

  • The Shack-Hartmann sensor's stability can be leveraged for high-sensitivity Fizeau-type wavefront tests.
  • This approach enables testing of opaque surfaces and improves measurement accuracy.
  • The technique shows potential for spherical Fizeau tests with specific resonator configurations.