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Picometer positioning system based on a zooming interferometer using a femtosecond optical comb.

Mariko Kajima1, Hirokazu Matsumoto

  • 1National Institute of Advanced Industrial Science and Technology (AIST), 1-1-1 Umezono, Tsukuba, 305-8563, Ibaraki, Japan. m.kajima@aist.go.jp

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Summary

A new zooming interferometer system calibrates ultrahigh-resolution linear encoders with unprecedented 30 pm resolution. This advancement in precision positioning utilizes stabilized lasers for highly accurate measurements.

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Area of Science:

  • Metrology
  • Optical Engineering
  • Nanotechnology

Background:

  • Accurate calibration of linear encoders is crucial for precision manufacturing and scientific instrumentation.
  • Existing methods face limitations in achieving ultrahigh resolutions required for advanced applications.

Purpose of the Study:

  • To develop a novel zooming interferometer system for calibrating ultrahigh-resolution linear encoders.
  • To achieve significantly enhanced positioning resolution and stability compared to current technologies.

Main Methods:

  • Development of a new zooming interferometer system.
  • Utilization of a femtosecond optical comb to stabilize two external-cavity diode lasers.
  • Employing a zooming ratio based on optical source wavelengths to scale down positioning resolution.

Main Results:

  • Achieved a positioning resolution better than 30 picometers (pm).
  • Demonstrated a system stability of 1 nanometer (nm).
  • Successfully scaled down the driving stage resolution to the controlled stage with high fidelity.

Conclusions:

  • The developed zooming interferometer system offers a breakthrough in ultrahigh-resolution linear encoder calibration.
  • The system's high resolution and stability pave the way for advancements in precision measurement and nanotechnology.
  • Femtosecond laser stabilization is a key enabling technology for next-generation metrology systems.