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High efficiency NbN nanowire superconducting single photon detectors fabricated on MgO substrates from a low
F Marsili1, D Bitauld, A Fiore
1Ecole Polytechnique Fédérale de Lausanne, Institute of Photonics and Quantum Electronics, Station 3, CH-1015 Lausanne, Switzerland. francesco.marsili@epfl.ch
Abstract:
We demonstrate high-performance nanowire superconducting single photon detectors (SSPDs) on bN thin films grown at a temperature compatible with monolithic integration. NbN films ranging from 150 nm to 3 nm in thickness were deposited by dc magnetron sputtering on MgO substrates at 400 degrees C SSPDs were fabricated on high quality NbN films of different thickness (7 to 3 nm) deposited under optimal conditions. Electrical and optical characterizations were performed on the SSPDs. The highest QE value measured at 4.2K is 20% at 1300 nm.
