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A MEMS light modulator based on diffractive nanohole gratings.

Jack L Skinner1, A Alec Talin, David A Horsley

  • 1Sandia National Laboratories, Livermore, CA 94551, USA. jlskinn@sandia.gov

Optics Express
|June 11, 2008
PubMed
Summary

We developed a novel microelectromechanical systems (MEMS) light modulator using nanohole arrays. This device achieves high reflectivity and a 3:1 contrast ratio with fast switching times and low voltage, enabling advanced optical applications.

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Area of Science:

  • Optoelectronics
  • Nanotechnology
  • Materials Science

Background:

  • Microelectromechanical systems (MEMS) are crucial for optical modulation.
  • Nanohole arrays offer unique optical properties for device applications.
  • Efficient light modulation requires precise control over optical resonances.

Purpose of the Study:

  • To design, fabricate, and test a MEMS light modulator utilizing nanohole arrays.
  • To investigate the optical properties and performance of nanohole-patterned silicon pixels.
  • To demonstrate electrostatic actuation for optical modulation in a MEMS device.

Main Methods:

  • Fabrication of flexure-suspended silicon pixels with 150 nm diameter nanoholes using nanoimprint lithography.
  • Integration of a counter electrode for electrostatic actuation.

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  • Characterization of optical stop-band and reflectivity at resonant wavelengths.

    • Main Results:

    • Demonstrated coupling of light into in-plane grating resonance via nanohole arrays.
    • Achieved a 3:1 contrast ratio at the resonant wavelength for gratings on bulk Si.
    • Observed switching time of 0.08 ms and switching voltage below 15V.

    Conclusions:

    • The developed MEMS light modulator effectively uses nanohole arrays for optical modulation.
    • The device exhibits promising performance characteristics for optical switching applications.
    • Nanoimprint lithography is a viable technique for fabricating such nanostructured MEMS devices.