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Related Experiment Video

Updated: Jul 4, 2026

Fabrication of Silica Ultra High Quality Factor Microresonators
07:51

Fabrication of Silica Ultra High Quality Factor Microresonators

Published on: July 2, 2012

Silicon microring resonators with 1.5-microm radius.

Qianfan Xu1, David Fattal, Raymond G Beausoleil

  • 1Hewlett-Packard Labs, 1501 Page Mill Road, Palo Alto, CA 94304, USA. qianfan.xu@hp.com

Optics Express
|June 11, 2008
PubMed
Summary

Researchers developed ultra-compact silicon microring resonators with a 1.5 micrometer radius, achieving high quality factors (Q) up to 9,000. This breakthrough minimizes light scattering for improved silicon photonics devices.

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Area of Science:

  • Photonics
  • Nanotechnology
  • Materials Science

Background:

  • Silicon microring resonators are key components in integrated photonics.
  • Achieving ultra-compact resonators with high performance remains a challenge.
  • Minimizing light scattering at waveguide-resonator junctions is critical for device efficiency.

Purpose of the Study:

  • To demonstrate a novel junction between silicon strip waveguides and ultra-compact silicon microring resonators.
  • To achieve critical coupling with high quality factors (Q) in sub-wavelength radius resonators.
  • To explore the fabrication limits of silicon microring resonators using standard lithography.

Main Methods:

  • Fabrication of silicon microring resonators with radii around 1.5 micrometers.

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Last Updated: Jul 4, 2026

Fabrication of Silica Ultra High Quality Factor Microresonators
07:51

Fabrication of Silica Ultra High Quality Factor Microresonators

Published on: July 2, 2012

Measurement of Quantum Interference in a Silicon Ring Resonator Photon Source
12:19

Measurement of Quantum Interference in a Silicon Ring Resonator Photon Source

Published on: April 4, 2017

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Fabrication and Characterization of High-Q Silicon Nitride Membrane Resonators

Published on: August 8, 2025

  • Integration with silicon strip waveguides using a U-shaped waveguide design.
  • Utilizing a stitch-free, SEM-based lithography system.
  • Characterization of resonator coupling and quality factors.

    • Main Results:

    • Demonstrated a junction minimizing spurious light scattering.
    • Achieved critically coupled cascaded silicon microring resonators.
    • Resonators with radii smaller than the operational wavelength (1.5 micrometers) and effective mode volumes around 1.0 micrometer cubed.
    • Obtained coupled Q factors up to 9,000.
    • Device fabrication compatible with widely-available lithography systems.

    Conclusions:

    • The developed junction enables efficient light coupling to ultra-compact silicon microring resonators.
    • The results approach the theoretical size limit for silicon microring resonators at high Q factors.
    • This work advances the development of miniaturized and high-performance silicon photonic devices.