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Updated: Jul 4, 2026
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Fabrication of Ultra-thin Color Films with Highly Absorbing Media Using Oblique Angle Deposition
Published on: August 29, 2017
Anisotropic optical thin films finely sculptured by substrate sweep technology
1Department of Electro-Optical Engineering, National Taipei University of Technology, No. 1, Sec. 3, Chung-Hsiao E. Rd. Taipei, Taiwan (106). jyjun@ntut.edu.tw
Optics Express
|June 11, 2008
Summary
This study demonstrates precise control over thin film properties by independently adjusting deposition and substrate sweep angles. This method allows for tailored optical characteristics in birefringent thin films for advanced applications.
Area of Science:
- Materials Science
- Optics
- Thin Film Technology
Background:
- Birefringent thin films are crucial optical components.
- Controlling film anisotropy and porosity is essential for tuning optical properties.
Purpose of the Study:
- To fabricate thin films with independently controlled principal axis orientations and refractive indices.
- To investigate the relationship between deposition parameters and film microstructure.
Main Methods:
- Fabrication of thin films using varying deposition angles and substrate sweep angles.
- Independent control of column tilt angle (axis orientation) and porosity (refractive indices).
Main Results:
- Successfully produced films with distinct principal axis orientations but similar refractive indices.
- Successfully produced films with identical principal axis orientations but varying refractive indices.
- Demonstrated separate control over porosity and column tilt angle.
Conclusions:
- Deposition angle and substrate sweep angle are effective parameters for independently controlling film anisotropy and porosity.
- This fabrication method enables precise tailoring of optical properties in birefringent thin films.
