Systematic errors for a Mueller matrix dual rotating compensator ellipsometer

Area of Science:

• Optical Physics
• Materials Science

Background:

• Ellipsometry is vital for characterizing anisotropic materials and complex systems.
• Mueller matrix ellipsometers are essential for precise measurements, but susceptible to errors.

Purpose of the Study:

• To characterize systematic errors in dual-rotating compensator Mueller Matrix Ellipsometers.
• To develop a method for eliminating these errors for improved analytical precision.

Main Methods:

• Derivation of first-order error expressions for Mueller matrix coefficients.
• Analysis of errors from azimuthal misalignment and optical element imperfections.
• Proposal of a four-zone averaging measurement technique.

Main Results:

• Explicit expressions for systematic errors in Mueller matrix coefficients were derived.
• The impact of component misalignment and imperfect optics on measurements was quantified.
• The proposed four-zone averaging method effectively cancels systematic errors.

Conclusions:

• Accurate Mueller matrix ellipsometry requires careful characterization and correction of systematic errors.
• The novel four-zone averaging method provides a robust solution for enhancing measurement precision.
• This work advances the reliable analysis of anisotropic materials using Mueller matrix ellipsometry.