Updated: Jul 4, 2026

Soft Lithographic Functionalization and Patterning Oxide-free Silicon and Germanium
Published on: December 16, 2011
Elias Estephan1, Christian Larroque, Frédéric J G Cuisinier
1Groupe d'Etude des Semi-conducteurs, UMR 5650, CNRS-Universite Montpellier II, 34095 Montpellier Cedex 5, France.
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