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Monolithic photolithographically patterned Fluorocur PFPE membrane valves and pumps for in situ planetary exploration

Peter A Willis1, Frank Greer, Michael C Lee

  • 1Instrument Electronics and Sensors Section, NASA Jet Propulsion Laboratory, California Institute of Technology, 4800 Oak Grove Dr., Pasadena, California 91109, USA. willis@jpl.nasa.gov

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|June 28, 2008
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