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Updated: Jul 4, 2026

Design and Characterization Methodology for Efficient Wide Range Tunable MEMS Filters
Published on: February 4, 2018
Wide electrical tunability of a GaInAsP/InP microdisk resonator
Marie Lesecq1, Sophie Maricot, Jean-Pierre Vilcot
1Institut d'Electronique, de Microélectronique et de Nanotechnologie, UMR 8520, Université des Sciences et Technologies de Lille, Avenue Poincaré, BP 60069, 59652 Villeneuve d'Ascq Cedex, France.
Abstract:
We report on the characterization of an InP/InGaAsP-material-based microdisk resonator optical filter. The originality here is constituted by the use of a localized control electrode that is used for the tuning of the resonance wavelength of the filter via the injection of a driving current. Tuning of the resonance wavelength close to 8 nm has been experimentally achieved for a drive current of 80 mA.
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