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Related Experiment Video

Updated: Jul 3, 2026

Implementation of a Reference Interferometer for Nanodetection

Implementation of a Reference Interferometer for Nanodetection

Published on: April 26, 2014

A generalized, periodic nonlinearity-reduced interferometer for straightness measurements.

Chien-Ming Wu¹

¹Department of Biomedical Engineering and Environmental Sciences, National TsingHua University, Hsinchu, Taiwan. cmwu@mx.nthu.edu.tw

The Review of Scientific Instruments

|July 8, 2008

Summary

A new interferometer design significantly reduces periodic nonlinearity, achieving sub-nanometer accuracy for precise displacement measurements. This advancement is crucial for nanometrology and scientific research requiring high-precision tools.

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Area of Science:

Metrology
Optical Engineering
Nanotechnology

Background:

Periodic nonlinearity is a key systematic error affecting nanometer-level displacement measurements.
High accuracy (sub-nanometer) interferometers are essential for nanometrology and fundamental scientific research.

Purpose of the Study:

To develop a generalized interferometer with reduced periodic nonlinearity for accurate straightness measurements.
To achieve displacement measurement accuracy below 1 nm.

Main Methods:

Developed a novel interferometer design based on three core construction principles.
Focused on achieving a highly stable design to minimize periodic nonlinearity.

Main Results:

The developed interferometer demonstrated significantly reduced periodic nonlinearity.
Verified periodic nonlinearity below 40 picometers (pm).
Achieved sub-nanometer accuracy in displacement measurements.

Conclusions:

The new interferometer design effectively minimizes periodic nonlinearity.
The design is suitable for high-accuracy applications in nanometrology.
Enables precise straightness measurements critical for scientific advancement.