Advances in microfabricated mass spectrometers
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Updated: Jul 3, 2026

Analysis of Volatile and Oxidation Sensitive Compounds Using a Cold Inlet System and Electron Impact Mass Spectrometry
Published on: September 5, 2014
1EEE Department, Imperial College London, Exhibition Road, London, SW7 2AZ, UK. r.syms@imperial.ac.uk
Abstract:
Mass filters for miniature mass spectrometers are now being constructed using three-dimensional microfabrication techniques. Crossed-field, travelling-wave, time-of-flight, quadrupole and cylindrical ion-trap filters have all been demonstrated, with steadily increasing mass range and mass resolution. This paper reviews the range of available devices and the state of the art.
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