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Comprehensive Characterization of Extended Defects in Semiconductor Materials by a Scanning Electron Microscope
Published on: May 28, 2016
1Advanced Electronic Materials Center, National Institute for Materials Science, Tsukuba, Ibaraki, Japan. CHEN.Jun@nims.go.jp
Advanced semiconductor diagnosis is achieved using electron-beam-induced current (EBIC) techniques. This method enhances the analysis of complex devices, revealing material properties and defects for improved performance.
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