High performance germanium photodetectors integrated on submicron silicon waveguides by low temperature wafer bonding
Long Chen1, Po Dong, Michal Lipson
1School of Electrical and Computer Engineering, Cornell University, Ithaca, NY 14853, USA. lc286@cornell.edu
Optics Express
|July 24, 2008
Abstract:
We demonstrate germanium photodetectors integrated on submicron silicon waveguides fabricated with a low temperature (


