Search research articles

ABOUT JoVE

Overview Leadership Blog JoVE Help Center

AUTHORS

Publishing Process Editorial Board Scope & Policies Peer Review FAQ Submit

LIBRARIANS

Testimonials Subscriptions Access Resources Library Advisory Board FAQ

RESEARCH

JoVE Journal Methods Collections JoVE Encyclopedia of Experiments Archive

EDUCATION

JoVE Core JoVE Business JoVE Science Education JoVE Lab Manual Faculty Resource Center Faculty Site

Terms & Conditions of Use

Related Concept Videos

You might also read

Related Articles

Articles linked to this work by shared authors, journal, and citation graph.

Sort by

Same author

Microfluidic co-culture system for synaptically segregated neural networks to explore astrocyte-driven neural pathology.

Microsystems & nanoengineering·2026

Same author

Miniaturised electrophoretic analyser with integrated filter-free microfluidic sample treatment for monitoring of inorganic anions in water.

Analytica chimica acta·2025

Same author

Impact of Surface Biofouling on Controlled Drug Release from Conductive Polymer Films and Its Mitigation Using Lubricin (Proteoglycan 4) Antifouling Coatings.

Langmuir : the ACS journal of surfaces and colloids·2025

Same author

A Scalable Synthetic Approach for Producing Homogeneous, Large Area 2D Highly Conductive Polymers.

ACS applied materials & interfaces·2025

Same author

Closed-loop peristaltic micro-pump for flow-through sample injection in capillary electrophoresis.

Talanta·2025

Same author

Tailoring molecularly imprinted polymer on titanium-multiwalled carbon nanotube functionalized gold electrode for enhanced chlorophyll determination in microalgae health assessment.

Mikrochimica acta·2024

Same journal

Microfluidic rare cell analysis beyond counting: workflow design from enrichment to multi-omics.

Lab on a chip·2026

Same journal

A sperm racetrack to separate sperm by swim speed.

Lab on a chip·2026

Same journal

Controlled encapsulation and droplet size prediction in two-step microfluidic double emulsions.

Lab on a chip·2026

Same journal

A particulate blood-mimicking fluid with physiological biconcave geometry for microscale hemorheology.

Lab on a chip·2026

Same journal

Multicellular sensor arrays fabricated by capillary stamping for pattern-based odor discrimination.

Lab on a chip·2026

Same journal

A real-time microfluidic surveillance system for multiplex detection of heavy metal contamination in wastewater.

Lab on a chip·2026

See all related articles

Search research articles

Related Experiment Video

Updated: Jul 3, 2026

Microfluidic Fabrication Techniques for High-Pressure Testing of Microscale Supercritical CO2 Foam Transport in Fractured Unconventional Reservoirs

Microfluidic Fabrication Techniques for High-Pressure Testing of Microscale Supercritical CO₂ Foam Transport in Fractured Unconventional Reservoirs

Published on: July 2, 2020

Maskless photolithography using UV LEDs.

Rosanne M Guijt¹, Michael C Breadmore

¹Australian Centre for Research on Separation Science, Private Bag 75, Hobart, TAS 7001, Australia. Rosanne.Guijt@utas.edu.au

|July 25, 2008

Summary

This summary is machine-generated.

UV light emitting diodes (LEDs) offer a budget-friendly, high-resolution method for direct writing lithography. This technique enables rapid prototyping of features under 20 micrometers, ideal for microfluidic devices.

More Related Videos

Multi-step Variable Height Photolithography for Valved Multilayer Microfluidic Devices

Multi-step Variable Height Photolithography for Valved Multilayer Microfluidic Devices

Published on: January 27, 2017

A Microfluidic Platform for High-throughput Single-cell Isolation and Culture

A Microfluidic Platform for High-throughput Single-cell Isolation and Culture

Published on: June 16, 2016

Related Experiment Videos

Last Updated: Jul 3, 2026

Microfluidic Fabrication Techniques for High-Pressure Testing of Microscale Supercritical CO2 Foam Transport in Fractured Unconventional Reservoirs

Microfluidic Fabrication Techniques for High-Pressure Testing of Microscale Supercritical CO₂ Foam Transport in Fractured Unconventional Reservoirs

Published on: July 2, 2020

Multi-step Variable Height Photolithography for Valved Multilayer Microfluidic Devices

Multi-step Variable Height Photolithography for Valved Multilayer Microfluidic Devices

Published on: January 27, 2017

A Microfluidic Platform for High-throughput Single-cell Isolation and Culture

A Microfluidic Platform for High-throughput Single-cell Isolation and Culture

Published on: June 16, 2016

Area of Science:

Optoelectronics
Microfabrication
Materials Science

Background:

Direct writing lithography is crucial for microfabrication.
Traditional lithography methods can be expensive and time-consuming.
Exploring cost-effective, high-resolution light sources is essential for rapid prototyping.

Purpose of the Study:

To evaluate the suitability of UV LEDs for direct writing lithography.
To demonstrate high-resolution patterning capabilities using UV LEDs.
To assess the potential for rapid prototyping of microfeatures.

Main Methods:

Collimation and focusing of a 372 nm UV LED output using optical components.
Substrate movement with a motorized linear stage for precise patterning.
Lithographic patterning of SU-8 and Ordyl SY 330 photoresists.
Fabrication of microfluidic devices using masters created by LED lithography.

Main Results:

Achieved line widths down to 35 micrometers in SU-8 at 80 micrometers/second.
Patterned features as narrow as 17 micrometers in Ordyl SY 330 at 245 micrometers/second.
Demonstrated rapid patterning, with a 75 mm feature created in 5 minutes.
Successfully fabricated functional microfluidic devices.

Conclusions:

UV LEDs are a viable and cost-effective light source for direct writing lithography.
The technique offers high resolution, suitable for features below 20 micrometers.
This method presents a promising alternative for rapid prototyping in microfabrication.