Resonance-mode effect on microcantilever mass-sensing performance in air

Xiaoyuan Xia1, Xinxin Li

  • 1State Key Laboratory of Transducer Technology, Shanghai Institute of Microsystem and Information Technology, Chinese Academy of Sciences, Shanghai, People's Republic of China.

Summary

This study explores air drag damping in micromachined cantilevers. The second flexural mode offers the highest quality factor and best performance for biomolecular sensing.

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