Related Experiment Video
Updated: Jul 2, 2026
10:26
Fabrication and Characterization of Superconducting Resonators
Published on: May 21, 2016
Fabrication techniques for microdevices in soft superconductors
1Département de Physique de la Matiére Condensée, Université de Genéve, Geneva 4, Switzerland.
The Review of Scientific Instruments
|October 1, 1978
Summary
This study introduces a low-cost photolithography and etching method for fabricating micro-scale devices. This technique offers a reproducible alternative for laboratory research, especially at low temperatures.
Area of Science:
- Materials Science
- Nanotechnology
- Physics
Background:
- Traditional methods for fabricating micro-scale devices can be costly or lack precision.
- Existing techniques may not be suitable for low-temperature laboratory research.
Purpose of the Study:
- To present a versatile, low-cost photolithographic microscope projection technique combined with chemical etching.
- To offer an alternative to mechanical scratching methods for micro-fabrication.
- To demonstrate the fabrication of devices with dimensions ranging from millimeters down to 0.5 micrometers.
Main Methods:
- Utilizing a photolithographic microscope projection technique.
- Employing chemical etching for material removal and structuring.
- Describing detailed equipment and procedural steps for laboratory application.
Main Results:
- Successful fabrication of devices with dimensions down to 0.5 micrometers.
- Demonstration of creating both single-material and two-material devices.
- Achieved defined and reproducible structures suitable for various applications.
Conclusions:
- The presented fabrication technique is a cost-effective and versatile alternative for micro-device creation.
- The method is particularly suitable for laboratory research, including low-temperature applications.
- The techniques enable the reproducible fabrication of structures across a wide range of dimensions.
