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Updated: Jul 2, 2026

Fabrication and Characterization of Superconducting Resonators

Fabrication and Characterization of Superconducting Resonators

Published on: May 21, 2016

Fabrication techniques for microdevices in soft superconductors.

J L Berchier¹, D H Sanchez

¹Département de Physique de la Matiére Condensée, Université de Genéve, Geneva 4, Switzerland.

The Review of Scientific Instruments

|October 1, 1978

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This study introduces a low-cost photolithography and etching method for fabricating micro-scale devices. This technique offers a reproducible alternative for laboratory research, especially at low temperatures.

Area of Science:

Materials Science
Nanotechnology
Physics

Background:

Traditional methods for fabricating micro-scale devices can be costly or lack precision.
Existing techniques may not be suitable for low-temperature laboratory research.

Purpose of the Study:

To present a versatile, low-cost photolithographic microscope projection technique combined with chemical etching.
To offer an alternative to mechanical scratching methods for micro-fabrication.
To demonstrate the fabrication of devices with dimensions ranging from millimeters down to 0.5 micrometers.

Main Methods:

Utilizing a photolithographic microscope projection technique.
Employing chemical etching for material removal and structuring.
Describing detailed equipment and procedural steps for laboratory application.

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Last Updated: Jul 2, 2026

Fabrication and Characterization of Superconducting Resonators

Fabrication and Characterization of Superconducting Resonators

Published on: May 21, 2016

Fabrication of Spatially Confined Complex Oxides

Fabrication of Spatially Confined Complex Oxides

Published on: July 1, 2013

Fabrication of Micro-Patterned Chip with Controlled Thickness for High-Throughput Cryogenic Electron Microscopy

Fabrication of Micro-Patterned Chip with Controlled Thickness for High-Throughput Cryogenic Electron Microscopy

Published on: April 21, 2022

Main Results:

Successful fabrication of devices with dimensions down to 0.5 micrometers.
Demonstration of creating both single-material and two-material devices.
Achieved defined and reproducible structures suitable for various applications.

Conclusions:

The presented fabrication technique is a cost-effective and versatile alternative for micro-device creation.
The method is particularly suitable for laboratory research, including low-temperature applications.
The techniques enable the reproducible fabrication of structures across a wide range of dimensions.