Fabrication techniques for microdevices in soft superconductors

Fabrication techniques for devices having dimensions of about a micrometer are presented. A versatile low-cost photolithographic microscope projection technique and chemical etching are used as part of the fabrication process. The whole procedure is proposed as an alternative to razor blade or diamond scratching techniques in laboratory research at low temperatures. A detailed description of the equipment and methods is given. Specific examples of one material devices and two material devices are described in connection with physical problems of recent interest. The broad field of application of the techniques shown make them appropriate for creating structures that might have defined and reproducible forms from millimeter dimensions down to 0.5 microm.