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Thin film thickness monitor shutter
W E Bailey1, L L Hatfield, B J Marshall
1Department of Physics, Texas Tech University, Lubbock, TX 79409, USA.
The Review of Scientific Instruments
|April 1, 1978
Abstract:
This article describes a simple electronic dual-activated shutter which is designed to interface with the Sloan digital thickness monitor model DTM-200 or a set of double-pole double-throw switches which can be operated manually.
