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Related Concept Videos

Inductively Coupled Plasma–Mass Spectrometry (ICP–MS): Overview01:19

Inductively Coupled Plasma–Mass Spectrometry (ICP–MS): Overview

In inductively coupled plasma–mass spectrometry (ICP–MS), an inductively coupled plasma (ICP) torch is used as an atomizer and ionizer. Solid samples are dissolved and volatilized before being introduced into the high-temperature argon plasma, while solution samples are nebulized and passed through the high-temperature argon plasma. Plasma dissociates the analytes and ionizes their component atoms to form a mixture of positive ions and molecular species. The positive ions are then passed on to...
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Inductively coupled plasma (ICP) is the most widely used plasma source in atomic emission spectroscopy (AES), also known as Inductively Coupled Plasma Optical Emission Spectroscopy (ICP-OES). The ICP source, or torch, consists of three concentric quartz tubes with argon gas flowing through them. A spark from a Tesla coil initiates the ionization of argon, generating a high-temperature plasma.
The ions and electrons produced interact with the fluctuating magnetic field created by a water-cooled...

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Related Experiment Video

Updated: Jul 2, 2026

Preparing an Isotopically Pure 229Th Ion Beam for Studies of 229mTh
10:42

Preparing an Isotopically Pure 229Th Ion Beam for Studies of 229mTh

Published on: May 3, 2019

Microwave ion source for high-current implanter.

N Sakudo1, K Tokiguchi, H Koike

  • 1Central Research Laboratory, Hitachi Limited, Kokubunji, Tokyo 185, Japan.

The Review of Scientific Instruments
|July 1, 1978
PubMed
Summary
This summary is machine-generated.

This study introduces a durable, high-current microwave ion source for mass separators. It achieves efficient ionization using a specific microwave discharge, enabling high ion currents for applications like phosphorus implantation.

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Area of Science:

  • Physics
  • Engineering
  • Materials Science

Background:

  • High-current ion sources are crucial for applications like mass separation and ion implantation.
  • Existing sources often face limitations in lifespan, current output, or power efficiency.
  • Optimizing ionization techniques is key to improving ion source performance.

Purpose of the Study:

  • To describe a novel long-life, high-current microwave ion source.
  • To detail the operational principles and design of the ion source for electromagnetic mass separators.
  • To evaluate the performance of the ion source, particularly its extracted current and efficiency.

Main Methods:

  • Utilizing a 2.45-GHz microwave discharge above the electron cyclotron resonance magnetic field.
  • Employing a ridged circular waveguide as the discharge chamber, with dielectric material restricting the discharge region.
  • Operating the source at low pressures (10^-2 - 10^-3 Torr) with high power efficiency.
  • Introducing PH(3) gas and extracting ions through a 2x40-mm slit.

Main Results:

  • The ion source demonstrates a long operational life and high current output.
  • Achieved a total extracted current of approximately 40 mA with PH(3) gas.
  • Obtained a P(+) ion implantation current exceeding 10 mA when coupled with a magnetic mass separator.
  • The source operates efficiently with incident microwave power of only several hundred watts.

Conclusions:

  • The developed microwave ion source is effective for generating high ion currents with good efficiency.
  • Its design and operational parameters make it suitable for integration with electromagnetic mass separators.
  • The source shows promise for applications requiring high-intensity ion beams, such as semiconductor doping.