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Synchronous modulation in scanning Auger electron microscopy
K Goto1, S Ichimura, R Shimizu
1Department of Applied Physics, Osaka University, Suita, Osaka 565, Japan.
Abstract:
The modulation frequency on the cylindrical mirror analyzer of a scanning Auger microscope has been synchronized to the digital scanning system. This technique allows one to obtain an Auger image free from moire patterns which arise from the beat between scanning and modulation frequencies, and permits operation at frequency settings which optimize use of the electronics in the detection system.
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