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Mass analyzer using electron-beam-guiding type ion source.

T Kishi1, I Yamada, T Takagi

  • 1Department of Electronics, Faculty of Engineering, University of Osaka Pref. Sakai, Japan 591Department of Electronics, Faculty of Engineering, Kyoto University, Kyoto, Japan 680.

The Review of Scientific Instruments
|December 1, 1979
PubMed
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This study presents a new mass analyzer using scanning electron microscopy (SEM) and electron beam bombardment. The device efficiently analyzes materials like NaCl, demonstrating its potential for surface analysis.

Area of Science:

  • Materials Science
  • Analytical Chemistry
  • Physics

Background:

  • Secondary ions generated from material surfaces can be challenging to collect and analyze.
  • Existing mass spectrometry techniques may have limitations in sensitivity or sample preparation.

Purpose of the Study:

  • To develop and evaluate a novel mass analyzer incorporating scanning electron microscopy (SEM) and an electron beam bombardment vaporization ion source.
  • To assess the efficiency of ion collection and perform qualitative mass analysis of materials.

Main Methods:

  • The mass analyzer utilizes a scanning electron microscopy (SEM) mechanism with an electron beam bombardment vaporization ion source.
  • Secondary ions are trapped in a potential well created by the electron beam and guided into the mass analyzer via a tantalum pipe cathode.

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  • Efficiency was determined by the ratio of collected ions to evaporated molecules, with subsidiary electrodes enhancing performance.

    • Main Results:

    • The efficiency of collected ions to evaporated molecules was measured.
    • With the addition of subsidiary electrodes, the efficiency reached 6.4x10(-4).
    • A 10-mm-thick sodium chloride (NaCl) sample was analyzed in depth over 16 minutes at 5 kV and 0.02 mA.

    Conclusions:

    • The developed mass analyzer demonstrates effective ion collection and material analysis capabilities.
    • The integration of SEM and electron beam bombardment provides a viable method for surface and depth profiling analysis.
    • The system shows promise for analyzing various materials, including salts like NaCl.