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Related Experiment Video

Updated: Jul 2, 2026

3D Depth Profile Reconstruction of Segregated Impurities Using Secondary Ion Mass Spectrometry

Published on: April 29, 2020

Microcomputer-based multiplexer for performing depth profiling with an Auger electron spectrometer.

J L Oppenheimer¹

¹University of California, Lawrence Livermore Laboratory, Livermore, California 94550.

The Review of Scientific Instruments

|May 1, 1979

Summary

This summary is machine-generated.

This study details an automated Auger electron spectroscopy instrument for sample profiling. The microcomputer-controlled system enhances data acquisition and analysis for material characterization.

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Area of Science:

Materials Science
Surface Science
Analytical Chemistry

Background:

Automated analysis of material surfaces is crucial for understanding composition and properties.
Auger electron spectroscopy (AES) provides valuable surface elemental information.
Existing AES systems often require manual operation, limiting throughput and reproducibility.

Purpose of the Study:

To describe a novel microcomputer-based instrument for automated sample profiling using Auger electron spectroscopy (AES) and an Ion Gun.
To detail the hardware and software implementation for controlling spectrometer scanning and data acquisition.
To explore the potential future applications of this automated profiling system.

Main Methods:

Development of a microcomputer-based control system utilizing an LSI-11 microcomputer.
Integration of spectrometer scanning control over predefined windows.
Implementation of interactive front panel controls for run setup and operation.
Data storage on magnetic disk for subsequent analysis and plotting.
Development of Fortran IV driving software for system operation.

Main Results:

The instrument successfully automates the profiling of sample surfaces using AES.
Spectral peak heights are recorded dynamically during controlled spectrometer scanning.
Interactive controls facilitate efficient setup and execution of profiling runs.
Generated data is readily available for detailed analysis and visualization.

Conclusions:

The described microcomputer-based instrument offers an efficient and automated approach to sample profiling with AES.
This system enhances data acquisition capabilities and facilitates in-depth material analysis.
The automated profiling system holds promise for expanded applications in surface science and materials characterization.