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Related Experiment Video

Updated: Jul 2, 2026

The Use of an Automated System (GreenFeed) to Monitor Enteric Methane and Carbon Dioxide Emissions from Ruminant Animals
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Simple calibrated gas feed system.

C M Horwitz1

  • 1School of Physics, University of Sydney, N. S. W. 2006 Australia.

The Review of Scientific Instruments
|May 1, 1979
PubMed
Summary
This summary is machine-generated.

Simple capillary tubes and pressure regulators provide accurate, calibrated gas flow for vacuum processes like plasma etching. This method offers reliable flow control across various gases and a wide flow rate range.

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Area of Science:

  • Materials Science
  • Chemical Engineering
  • Physics

Background:

  • Precise gas flow control is critical for vacuum-based manufacturing processes.
  • Techniques like plasma etching and sputtering demand consistent gas delivery.

Purpose of the Study:

  • To evaluate the efficacy of capillary tubes with pressure regulators for calibrated gas flow.
  • To provide calibration data for various gases and capillary dimensions.

Main Methods:

  • Utilized capillary tubes of varying lengths and diameters.
  • Integrated a simple pressure regulator for flow control.
  • Calibrated gas flow for multiple gas types including Argon (A), Nitrogen (N2), Hydrogen (H2), Helium (He), Methane (CH4), Dichlorodifluoromethane (CCl2F2), and Chlorodifluoromethane (CHClF2).

Main Results:

  • Satisfactory calibrated gas flow was achieved using the capillary tube and regulator system.
  • Experimental results showed good agreement with viscous flow theory.
  • Flow rate resettability and variability ranged from +/-2% to +/-20% over a 100:1 flow rate range.

Conclusions:

  • Capillary tubes combined with simple pressure regulators offer a viable solution for calibrated gas flow in vacuum processes.
  • The method is adaptable for different gases and provides reliable performance across a broad flow rate spectrum.