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Updated: Jul 2, 2026

11:34
Epitaxial Nanostructured α-Quartz Films on Silicon: From the Material to New Devices
Published on: October 6, 2020
High accuracy quartz crystal thin film monitor
B Ramadan1, K Piyakis, J F Kos
1Department of Physics and Astronomy, Universtiy of Regina, Regina, Saskatchewan, Canada.
The Review of Scientific Instruments
|July 1, 1979
Abstract:
A quartz resonator thin film monitor of exceptionally high accuracy and resolution has been developed. It is capable of providing measurements with an effective resolution of 0.001 nm and a corresponding relative accuracy of about 1% for a 0.100-nm-thick film of gold. A novel dual oscillator and mixer using integrated circuits is also described.

