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Updated: Jul 2, 2026

The Frequency Domain Thermoreflectance Technique for Thermal Property Measurements

The Frequency Domain Thermoreflectance Technique for Thermal Property Measurements

Published on: December 5, 2025

Analog differential-phase detection in optical coherence reflectometer.

Huan-Jang Huang¹, Tsung-Yu Hsieh, Li-Dek Chou

¹Department of Biomedical Imaging and Radiological Sciences, National Yang-Ming University, Taipei 112, Taiwan.

|August 20, 2008

Summary

This summary is machine-generated.

A new differential-phase optical coherence reflectometer (DP-OCR) offers high-resolution surface profiling and motion measurement. This novel instrument achieved an axial displacement resolution of 185 picometers.

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Area of Science:

Optical Metrology
Precision Measurement
Instrumentation

Background:

Optical Coherence Reflectometry (OCR) is a technique for non-contact surface profiling.
Differential-phase methods can enhance sensitivity in interferometric measurements.
Existing OCR systems may have limitations in resolution or measurement speed.

Purpose of the Study:

To propose and demonstrate a novel differential-phase optical coherence reflectometer (DP-OCR).
To evaluate the performance of the DP-OCR for localized surface profile measurements.
To assess the capability of the DP-OCR for measuring dynamic motion, such as translation speed.

Main Methods:

Integration of a low-coherence light source with an analog differential-phase decoding method.
Development of a DP-OCR system for high-resolution displacement sensing.
Experimental validation using an optical grating (1200 lp/mm) and a tilted mirror setup.

Main Results:

Successful localized surface profile measurement of a 1200 lp/mm optical grating.
Demonstration of the DP-OCR's ability to measure the translation speed of a tilted mirror.
Achieved an experimental axial displacement resolution of 185 picometers (pm).

Conclusions:

The proposed DP-OCR system is effective for high-resolution surface metrology.
The DP-OCR demonstrates potential for precise measurement of both static profiles and dynamic motion.
The achieved 185 pm resolution highlights the system's sensitivity for advanced optical measurements.