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Fabrication and Characterization of High-Q Silicon Nitride Membrane Resonators
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Fabrication and Characterization of High-Q Silicon Nitride Membrane Resonators

Published on: August 8, 2025

Coupled-ring-resonator-based silicon modulator for enhanced performance

Yunchu Li1, Lin Zhang, Muping Song

  • 1Dept of Electrical Engineering, Univ of Southern California, Los Angeles, CA 90089, USA. yunchuli@usc.edu

Optics Express
|August 20, 2008
PubMed

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