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A new scanning heterodyne interferometer scheme for mapping both surface structure and effective local reflection

Kang Hyuck Kwon¹, Bong Soo Kim, Kyuman Cho

¹Department of Physics, Sogang University, Mapo-Gu, Seoul, Korea.

|August 20, 2008

Summary

A novel scanning microscope maps surface topography using phase and amplitude data. This technique reveals true surface structure and effective local reflection coefficients for advanced surface diagnostics.

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Area of Science:

Optics and Photonics
Materials Science
Surface Science

Background:

Accurate surface characterization is crucial for material science and diagnostics.
Existing microscopy techniques may have limitations in simultaneously mapping phase and amplitude.
Understanding the relationship between surface structure and optical properties is essential.

Purpose of the Study:

To introduce a new scanning microscope capable of mapping both phase and amplitude changes of a probe beam.
To demonstrate imaging of true surface structure using phase measurements.
To correlate amplitude images with the effective local reflection coefficient (ELRC).

Main Methods:

Development of a scanning microscope system.
Utilizing phase measurements to reconstruct surface topography.

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Employing amplitude measurements to map the effective local reflection coefficient (ELRC).

Analysis of the relationship between surface structure and ELRC.

Main Results:

The developed scanning microscope successfully maps both phase and amplitude.
True surface structure is imaged via phase measurements.
Amplitude images correspond to the magnitude of the effective local reflection coefficient (ELRC).
Achieved spatial resolution of 0.67 micrometers, limited by diffraction.
Precision for measuring surface height variations is in the nanometer range.

Conclusions:

The new scanning microscopy scheme provides simultaneous phase and amplitude mapping.
Phase imaging accurately represents the true surface structure.
Amplitude imaging offers insights into the effective local reflection coefficient.
The technique shows significant potential for surface diagnostics and material analysis.