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Two-dimensional integration of a vertical-cavity surface-emitting laser and photodetectors for position sensing

Antonios V Giannopoulos1, Ansas M Kasten, Christopher M Long

  • 1Micro and Nanotechnology Laboratory, Department of Electrical and Computer Engineering, University of Illinois at Urbana-Champaign, 208 North Wright Street, Urbana, Illinois 61801, USA. giannopo@uiuc.edu

Applied Optics
|September 2, 2008
PubMed

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