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Preparation of Silicon Nanowire Field-effect Transistor for Chemical and Biosensing Applications
Published on: April 21, 2016
Novel poly-silicon nanowire field effect transistor for biosensing application.
Cheng-Yun Hsiao1, Chih-Heng Lin, Cheng-Hsiung Hung
1Institute of Biological Science and Technology, National Chiao Tung University, Hsinchu 300, Taiwan.
Biosensors & Bioelectronics
|September 2, 2008
Summary
A low-cost poly-silicon nanowire field-effect transistor (poly-Si NW FET) was developed for biosensing. This method enables sensitive detection of molecules like avidin and streptavidin in the sub pM to nM range.
Area of Science:
- Materials Science
- Nanotechnology
- Biotechnology
Background:
- Biosensors are crucial for detecting biomolecules.
- Existing methods for fabricating nanowire field-effect transistors (NW FETs) can be expensive and complex.
- There is a need for cost-effective and scalable NW FETs for biosensing.
Purpose of the Study:
- To demonstrate a simple and low-cost method for fabricating poly-silicon nanowire field-effect transistors (poly-Si NW FETs).
- To evaluate the biosensing capabilities of the fabricated poly-Si NW FETs using a model biotin and avidin/streptavidin system.
Main Methods:
- Fabrication of poly-silicon nanowire (poly-Si NW) channels using the poly-silicon (poly-Si) sidewall spacer technique.
- Characterization of the electronic properties of poly-Si NW FETs in aqueous solutions.
- Demonstration of biosensing using a biotin and avidin/streptavidin model system, analyzing changes in I(D)-V(G) curves.
Main Results:
- The fabrication method is comparable to commercial semiconductor processes and avoids expensive electron-beam lithography.
- The electronic properties of poly-Si NW FETs in solution are similar to single-crystal silicon NW FETs.
- The poly-Si NW FETs successfully detected avidin and streptavidin at concentrations ranging from sub-picomolar to nanomolar.
- Detected molecules showed specific electrical responses based on their charge (negatively charged streptavidin, positively charged avidin).
Conclusions:
- The developed poly-Si NW FET offers a simple, low-cost, and scalable approach for biosensing applications.
- The device exhibits excellent electrical properties and sensitivity for detecting biomolecules.
- Poly-Si NW FETs hold significant potential as versatile transducers for various biosensing applications.

