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Design and Characterization Methodology for Efficient Wide Range Tunable MEMS Filters
Published on: February 4, 2018
Tunable VCSEL with ultra-thin high contrast grating for high-speed tuning
Ye Zhou1, Michael C Huang, Connie J Chang-Hasnain
1Department of Electrical Engineering and Computer Science, University of California, Berkeley, California 94720, USA.
Optics Express
|September 6, 2008
Summary
We developed a fast, tunable laser using a nano-electromechanical optoelectronic (NEMO) tunable vertical-cavity surface-emitting laser (VCSEL). This device achieves rapid wavelength tuning, making it ideal for advanced optical applications.
Area of Science:
- Optoelectronics
- Nanotechnology
- Photonics
Background:
- Vertical-cavity surface-emitting lasers (VCSELs) are crucial components in optical systems.
- Tunable VCSELs offer wavelength flexibility but often suffer from slow tuning speeds.
- Previous tunable VCSELs based on distributed Bragg reflectors (DBRs) have limitations in tuning speed and efficiency.
Purpose of the Study:
- To develop a novel nano-electromechanical optoelectronic (NEMO) tunable VCSEL.
- To achieve rapid wavelength tuning with high single-mode emission.
- To demonstrate the potential of high-index-contrast subwavelength gratings (HCGs) in VCSEL tuning.
Main Methods:
- Fabrication of an ultra-thin (145 nm) electrostatically actuated high-index-contrast subwavelength grating (HCG).
- Design of the HCG to strongly reflect TE-polarized light for laser operation.
- Characterization of the VCSEL's emission properties, including wavelength tuning, single-mode operation, and output power under continuous wave (CW) operation.
Main Results:
- Achieved single-mode emission with a side-mode suppression ratio (SMSR) greater than 45 dB.
- Demonstrated continuous wavelength tuning of approximately 4 nm at room temperature.
- Obtained an output power up to 2 mW under CW operation.
- Experimentally demonstrated a record-short wavelength tuning time of approximately 90 ns.
Conclusions:
- The developed NEMO tunable VCSEL with an HCG offers significant advantages in tuning speed (>100 times faster than DBR-based VCSELs).
- The device shows a 1.7 times improvement in tuning speed compared to previously reported TM-polarized NEMO tunable VCSELs.
- This technology presents a promising platform for high-speed tunable laser applications.

