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Soft X-ray holographic grating beam splitter including a double frequency grating for interferometer pre-alignment.

Ying Liu¹, Xin Tan, Zhengkun Liu

¹National Synchrotron Radiation Laboratory, University of Science and Technology of China, Hefei, People's Republic of China. liuychch@ustc.edu.cn

|September 17, 2008

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Fabricated soft X-ray Mach-Zehnder interferometer beam splitters utilize holographic lithography. A novel low-frequency beat grating simplifies alignment for X-ray interferometry.

Area of Science:

Optics and Photonics
X-ray Interferometry
Nanofabrication

Background:

Soft X-ray interferometry requires precise optical components for high-resolution measurements.
Traditional alignment methods for X-ray interferometers can be complex and time-consuming.
Holographic lithography offers a precise method for fabricating micro- and nanostructures.

Purpose of the Study:

To develop and fabricate a novel grating beam splitter for soft X-ray Mach-Zehnder interferometers.
To integrate both operational and pre-alignment gratings onto a single substrate.
To simplify the alignment process of X-ray interferometers using a visible light pre-alignment grating.

Main Methods:

Holographic interference lithography was employed to fabricate the grating beam splitter.

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The beam splitter incorporates two gratings: an operational grating for 13.9 nm X-rays (1000 lines/mm) and a pre-alignment grating for 632.8 nm visible light (22 lines/mm).

A low-spatial-frequency beat grating, derived from a holographic double frequency grating, was utilized as the pre-alignment grating.

Main Results:

Successfully fabricated a dual-grating beam splitter on a single substrate.
Demonstrated the functionality of the operational grating for soft X-ray wavelengths and the pre-alignment grating for visible light.
The pre-alignment grating's diffraction pattern allows direct judgment of grating line parallelism.

Conclusions:

The developed grating beam splitter is effective for soft X-ray Mach-Zehnder interferometers.
The integrated pre-alignment grating simplifies the interferometer setup and alignment procedure.
This fabrication technique offers a promising approach for advancing X-ray interferometry applications.